Microhotplates based on Pt and Pt-Rh films: The impact of composition, structure, and thermal treatment on functional properties

被引：17
作者：
Kalinin, I. A. [1 ]
Roslyakov, I. V. [1 ,2 ,3 ]
Tsymbarenko, D. M. [3 ]
Bograchev, D. A. [4 ]
Krivetskiy, V. V. [3 ]
Napolskii, K. S. [1 ,3 ]
机构：
[1] Lomonosov Moscow State Univ, Dept Mat Sci, Moscow 119991, Russia
[2] RAS, Kurnakov Inst Gen & Inorgan Chem, Moscow 119991, Russia
[3] Lomonosov Moscow State Univ, Dept Chem, Moscow 119991, Russia
[4] Natl Res Univ Higher Sch Econ, Moscow 123458, Russia
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2021年 / 317卷
基金：
俄罗斯基础研究基金会;
关键词：
Platinum-rhodium alloy; Thin film; Microhotplate; Anodic alumina; Gas sensor; Simulation; THIN-FILMS; ELECTROMECHANICAL PROPERTIES; TEMPERATURE; SENSOR; MICROHEATER; FABRICATION; ELECTRODES; STABILITY; DEVICES;
D O I：
10.1016/j.sna.2020.112457
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Recent progress in portable semiconductor and thermocatalytic gas sensors requires the development of the microhotplates with reduced power consumption, increased shock resistance, and low resistance drift. Rh is known as alloying component, which allows one to decrease the diffusion mobility of Pt in bulk resistive heating elements. Here, a comparison study on the stability of microhotplates based on Pt and Pt-Rh thin films is performed. The porous anodic alumina is used as a substrate, which provides high adhesion of the metal film and the thermal expansion coefficient compatible with Pt and Pt-Rh alloys. Morphology and crystal structure of metal films are studied after recrystallization annealing in air at the temperatures 600-810 degrees C. To simulate thermal effects of the microhotplates, a model based on the finite element method is developed. The perspectives of Pt-11 % Rh alloy as a material for microhotplates operating at the temperatures above 500 degrees C are discussed. The achieved characteristics of the fabricated Pt-Rh microhotplates on porous anodic alumina substrates allow one to use them as a universal platform for semiconductor and thermocatalytic gas sensors manufacturing. (C) 2020 Elsevier B.V. All rights reserved.
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页数：9
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