3-D phase profilometry based on object phase shifting method with fringe stabilizing system

In order to decrease the phase shift error, this paper presented a new object phase shifting method by using fringe stabilizing device to stabilize the interference fringe. The experimental result shows the fringe drift is less than lambda/20 in five minutes, and the phase shifting precision is more than 0.004 pi, furthermore the system is very simple, performance reliable and operating convenience, it will take an important role for improving the measure precision of 3-D phase profilometry, more strong practicality and popularly application prospect.