Composition design and properties of CoNbZr amorphous films deposited by unbalanced magnetron sputtering

被引：2

作者：

Guo Guang-wei ^{[1
,2
]}

Tang Guang-ze ^{[1
]}

Wang Ya-jun ^{[1
]}

Ma Xin-xin ^{[1
,3
]}

Wang Yu-jiang ^{[1
]}

机构：

[1] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China

[2] Daqing Petr Inst, Sch Mech Sci & Engn, Daqing 163318, Peoples R China

[3] Harbin Inst Technol, State Key Lab Adv Welding Prod Technol, Harbin 150001, Peoples R China

来源：

JOURNAL OF CENTRAL SOUTH UNIVERSITY OF TECHNOLOGY | 2009年 / 16卷 / 05期

关键词：

CoNbZr amorphous film; magnetron co-sputtering; isothermal annealing; THIN-FILMS; ALLOYS; ANISOTROPY; BEHAVIOR;

D O I：

10.1007/s11771-009-0119-y

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

Co87Nb10Zr3, Co76Nb19Zr5, Co64Nb26Zr10 and Co64Nb16Zr20 amorphous films were deposited on noncrystalline glass substrates by DC unbalanced magnetron sputtering. The compositions of amorphous films were tailored in the light of the individual deposition rate of Co, Nb and Zr. The amorphous films with the anticipated composition were prepared by means of co-sputtering Co, Nb and Zr targets simultaneously. It is indicated that there is interaction among three targets during co-sputtering. The morphology and composition of the films were observed by SEM, AFM and EDS. The structure and magnetic property were measured by XRD and physical property measurement system (PPMS). The coercivity changes with the composition, varying from 240 to 1 600 A/m. After vacuum isothermal annealing at temperatures of 475, 500, 525 and 550 degrees C for 15 and 30 min, respectively, it is found that high Nb content is beneficial to improving thermal stability of amorphous films. The crystallized films have the mean grain size of 2-19 nm.

引用

页码：719 / 724

页数：6

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