MEASUREMENT OF SURFACE ACOUSTIC WAVES PROPAGATION USING A PIEZORESISTIVE CANTILEVER ARRAY

被引：0
|
作者：
Minh-Dung, Nguyen [1 ]
Quang-Khang, Pham [1 ]
Thanh-Vinh, Nguyen [1 ]
Matsumoto, Kiyoshi [1 ]
Shimoyama, Isao [1 ]
机构：
[1] Univ Tokyo, Tokyo 1138656, Japan
来源：
2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) | 2015年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents an approach to measure the propagation of surface acoustic waves (SAW), using a piezoresistive cantilever array. SAW was measured by cantilevers designed at the liquid-substrate interaction area by utilizing the structure of liquid-cantilever-air, which is highly sensitive and is able to measure acoustic wave at high frequency. Experiment results demonstrate that the measurable range was confirmed from 0.1 MHz up to 100 MHz. Phase shift and propagation decay were also observed along the propagating direction of SAW.
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页码：144 / 145
页数：2
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