Analytical solution of the inverse optical problem for very thin films

被引:0
作者
Hristov, B. [1 ]
Gushterova, P. [1 ]
Sharlandjiev, P. [1 ]
机构
[1] Bulgarian Acad Sci, Cent Lab Opt Storage & Proc Informat, BU-1113 Sofia, Bulgaria
来源
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS | 2007年 / 9卷 / 01期
关键词
very thin films; optical constants; exact analytical approach;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The determination of the complex refractive index (h) and the physical thickness (d) of very thin films (d congruent to lambda/50, lambda is the wavelength in VIS and NIR) is still a challenging task in the field of the inverse optical problems. The physical reality of these films makes difficult the application of methods, commonly used for the determination of (n) over tilde and d of thicker films. For several years we have been working on the development and the implementation of a method, designed especially for determination of h and d of very thin films. The nanothickness of the films allows us to develop in series of (n) over tilded/lambda the Abeles characteristic matrix elements. Thus, approximated expressions for the film transmittance (T-f), front side (R-f) and backside (R-f) reflectance are derived. For estimation of (n) over tilde and d we use the system (1+R-f)/T-f, (1-R-f)/T-f and (1-R'(f))/T-f. Here we apply an exact analytical approach to solve the system, obtained by development of the Abeles characteristic matrix elements to the 4-th power. For the first time, the set of equations for (1+R-f)/T-f, (1-R-f)/T-f and (1-R-f)/T-f is solved analytically. Besides the increase of the accuracy of the solutions, no initial information about the unknown parameters is needed.
引用
收藏
页码:217 / 220
页数:4
相关论文
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