Field Emission Enhancement in Ion Implanted Ultra-nanocrystalline Diamond Films

被引：3
|
作者：
Palathinkal, Thomas Joseph [5 ]
Tai, Nyan-Hwa [5 ]
Lee, Chi-Young [4 ]
Niu, Huan [3 ]
Cheng, Hsiu-Fung [2 ]
Pong, Way-Faung [1 ]
Lin, I-Nan [1 ]
机构：
[1] Tamkang Univ, Dept Phys, Tamsui 251, Taiwan
[2] Natl Taiwan Normal Univ, Dept Phys, Taipei 116, Taiwan
[3] Natl Tsing Hua Univ, Accelerator Div, Dev Ctr, Hsinchu 300, Taiwan
[4] Natl Tsing Hua Univ, Ctr Mat Sci, Hsinchu 300, Taiwan
[5] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
来源：
PLASMA PROCESSES AND POLYMERS | 2009年 / 6卷
关键词：
electron field emission; films; ion implantation; UNCD; X-ray photoelectron spectroscopy; ELECTRON-EMISSION; THRESHOLD;
D O I：
10.1002/ppap.200930107
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The effects of B and N ion implantation on structural and electron field emission (EFE) properties of ultra-nanocrystalline diamond (UNCD) films are reported. Low-dose (10(12) ions/cm(2)) B ion implantation & annealing processes insignificantly changed the EFE properties, high-dose (10(15)ions/cm(2)) ion implantation & annealing processes resulted in surface graphitization for UNCD films. While the field emission property of UNCD films was greatly improved due to the N ion implantation & annealing processes, they were degraded due to B ion implantations & annealing processes. Such a phenomenon is accounted for by the fact that N ions residing in grain boundaries can convert the UNCD grains into semi-conducting by charge-transfer process, whereas B ions react with carbon forming covalent bonds and are not transferring the charges with UNCD grains.
引用
收藏
页码：S834 / S839
页数：6
相关论文
共 50 条
  • [1] Adhesion properties of nitrogen ion implanted ultra-nanocrystalline diamond films on silicon substrate
    Palnitkar, U. A.
    Joseph, P. T.
    Niu, H.
    Huang, H. Y.
    Fang, W. L.
    Cheng, H. F.
    Tai, N. H.
    Lin, I. N.
    DIAMOND AND RELATED MATERIALS, 2008, 17 (4-5) : 864 - 867
  • [2] Fabrication and field emission properties of ultra-nanocrystalline diamond lateral emitters
    Liou, Yan-Lun
    Liou, Jyun-Cheng
    Huang, Jin-Hua
    Tai, Nyan Hwa
    Lin, I-Nan
    DIAMOND AND RELATED MATERIALS, 2008, 17 (4-5) : 776 - 781
  • [3] Synthesis and Field Emission Properties of Ultra-Nanocrystalline Diamond Fibers and Helices
    Singh, M. K.
    Titus, E.
    Willinger, M. G.
    Gracio, J.
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2010, 10 (04) : 2422 - 2433
  • [4] Tailoring the matrix in ultra-nanocrystalline diamond films
    Buck, Volker
    Woehrl, Nicolas
    Japanese Journal of Applied Physics, 2008, 47 (10 PART 2): : 8208 - 8213
  • [5] Tailoring the Matrix in Ultra-Nanocrystalline Diamond Films
    Buck, Volker
    Woehrl, Nicolas
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (10) : 8208 - 8213
  • [6] The potential application of ultra-nanocrystalline diamond films for heavy ion irradiation detection
    Chen, Huang-Chin
    Chen, Shih-Show
    Wang, Wei-Cheng
    Lee, Chi-Young
    Guo, Jinghua
    Lin, I-Nan
    Chang, Ching-Lin
    AIP ADVANCES, 2013, 3 (06):
  • [7] Microstructure control and mechanical properties of ultra-nanocrystalline diamond films
    Tu, Juping
    Zhao, Yun
    Chan, Siyi
    Zheng, Yuting
    Chen, Liangxian
    Wei, Junjun
    Liu, Jinlong
    Li, Chengming
    CERAMICS INTERNATIONAL, 2024, 50 (21) : 43780 - 43787
  • [8] Substrate temperature effects on the electron field emission properties of nitrogen doped ultra-nanocrystalline diamond
    Chen, Y. C.
    Tai, N. H.
    Lin, I. N.
    DIAMOND AND RELATED MATERIALS, 2008, 17 (4-5) : 457 - 461
  • [9] Oxygen ion implanted grains dominantly contributed electron field emission of nanocrystalline diamond films
    Xu, Hui
    Chen, Chengke
    Fan, Dong
    Jiang, Meiyan
    Li, Xiao
    Hu, Xiaojun
    CARBON, 2019, 145 : 187 - 194
  • [10] Effects of Surface Pretreatment on Nucleation and Growth of Ultra-Nanocrystalline Diamond Films
    刘聪
    汪建华
    刘斯佳
    熊礼威
    翁俊
    崔晓慧
    Plasma Science and Technology, 2015, 17 (06) : 496 - 501
12345