A micromechanical mirror based on PZN-PT single crystal films

被引：1

作者：

Moon, KS ^{[1
]}

Levy, M ^{[1
]}

Hong, YK ^{[1
]}

Ghimire, S ^{[1
]}

机构：

[1] Michigan Technol Univ, Dept MEEM, Houghton, MI 49931 USA

来源：

OPTOMECHATRONIC SYSTEMS III | 2002年 / 4902卷

关键词：

PZN-PT; micro-mirror; piezoelectric actuation; micro-actuator;

D O I：

10.1117/12.467609

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

This paper presents an investigation of a stand-alone PZN-PT film-based movable micro-mirror and characterizes its precision level. Micro-mirrors have received considerable attention for applications in various micro-opto-electromechanical systems (MOEMS). For example, there is considerable interest in creating micro-mirror arrays for image display and telecominunication,applications. Such optical applications require high precision position control of micro-mirrors. We present the development of stand-alone self-moving micro-mirrors on the basis of a single-film actuation mechanism. The mirror design provides for tilt motion using a single-crystal Pb(Zn1/3Nb2/3)O-3-PbTiO3 (PZN-PF) film unimorph actuator. A prototype micro-mirror plate is designed to a size of 600 x 400 x 10mum(3) including actuation device. In this paper, it is shown that a prototype micro-mirror fabricated in our laboratories can be operated at frequency of 50 kHz.

引用

页码：146 / 153

页数：8

共 12 条

[1] CONANT RA, 1999, P 10 INT C SOL STAT
[2] Silicon-micromachined scanning confocal optical microscope
Dickensheets, DL
Kino, GS
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (01) : 38 - 47
[3] Polarization rotation mechanism for ultrahigh electromechanical response in single-crystal piezoelectrics
Fu, HX
Cohen, RE
[J]. NATURE, 2000, 403 (6767) : 281 - 283
[4] Two-dimensional micro optical scanner excited by PZT thin film microactuator
Goto, H
[J]. OPTOELECTRONIC MATERIALS AND DEVICES, 1998, 3419 : 227 - 235
[5] HAGELIN PM, 1999, P 10 C SOL STAT SENS
[6] HORNBECK L, 1989, P SPIE, V1150
[7] Stress tuning in crystal ion slicing to form single-crystal potassium tantalate films
Levy, M
Osgood, RM
Bhalla, AS
Guo, R
Cross, LE
Kumar, A
Sankaran, S
Bakhru, H
[J]. APPLIED PHYSICS LETTERS, 2000, 77 (14) : 2124 - 2126
[8] Fabrication of single-crystal lithium niobate films by crystal ion slicing
Levy, M
Osgood, RM
Liu, R
Cross, LE
Cargill, GS
Kumar, A
Bakhru, H
[J]. APPLIED PHYSICS LETTERS, 1998, 73 (16) : 2293 - 2295
[9] MOON KS, 2002, P ASPE 17 ANN ASPE M
[10] NEILSON DT, 2000, P OPT FIB COMM C OFC

← 1 2 →