Magnetometric sensors based on planar spiral coils

被引：10
作者：
Almazán, RP
Pérez, L
Aroca, C
Sánchez, MC
López, E
Sánchez, P
机构：
[1] Univ Politecn Madrid, ETSI Telecomun, ISOM, E-28040 Madrid, Spain
[2] Univ Complutense Madrid, Fac Fis, Dept Fis Mat, E-28040 Madrid, Spain
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2003年 / 254卷
关键词：
electrodeposition; sensor fluxgate; two-dimensional system;
D O I：
10.1016/S0304-8853(02)00924-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
By using a combination of sputtering, photolithography, and electrochemical deposition techniques spiral coils with good performances have been grown (low resistance, high number of turns/cm...). This can be used as exciting coils of a magnetic sensor or as a part of a planar inductor. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：630 / 632
页数：3
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