A SMART MICROFLUIDIC SYSTEM INTEGRATED WITH PRESSURE SENSORS AND FLOW SENSOR BASED ON ELECTROCHEMICAL IMPEDANCE METHODS

被引：0

作者：

Tang, Longjun

Liu, Jingquan ^{[1
]}

Hong, Wen

Wang, Tao

Wang, Xiaolin

Chen, Xiang

Yang, Bin

Yang, Chunsheng

机构：

[1] Shanghai Jiao Tong Univ, Dept Micro Nanoelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai, Peoples R China

来源：

30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017) | 2017年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on a smart microfluidic system with multiple micro sensors integrated in the channel. It consists of a standard PDMS channel, and a smart substrate which has six bubble pressure sensors and a flow sensor all based on electrochemical impedance methods. This system will allow, for the first time, directly and simultaneously monitoring of multiple parameters in the channel of microfluidic systems, including the monitoring of local pressures, flow rate, particles, cells, and so on.

引用

页码：1300 / 1303

页数：4

共 16 条

[1] Method for flow measurement in microfluidic channels based on electrical impedance spectroscopy [J].

Arjmandi, Nima ;

Liu, Chengxun ;

Van Roy, Willem ;

Lagae, Liesbet ;

Borghs, Gustaaf .

MICROFLUIDICS AND NANOFLUIDICS, 2012, 12 (1-4) :17-23

[2] Multiplex pressure measurement in microsystems using volume displacement of particle suspensions [J].

Chung, Kwanghun ;

Lee, Hyewon ;

Lu, Hang .

LAB ON A CHIP, 2009, 9 (23) :3345-3353

[3] The pressure drop along rectangular microchannels containing bubbles [J].

Fuerstman, Michael J. ;

Lai, Ann ;

Thurlow, Meghan E. ;

Shevkoplyas, Sergey S. ;

Stone, Howard A. ;

Whitesides, George M. .

LAB ON A CHIP, 2007, 7 (11) :1479-1489

[4] Development of ultra-miniature pressure sensors for 1-French biomedical applications and beyond [J].

Gowrishetty, Usha ;

Walsh, Kevin ;

Aebersold, Julia ;

Rousse, Tommy ;

Millar, Huntly ;

Jackson, Douglas .

SENSOR LETTERS, 2008, 6 (03) :433-440

[5] AC frequency characteristics of coplanar impedance sensors as design parameters [J].

Hong, J ;

Yoon, DS ;

Kim, SK ;

Kim, TS ;

Kim, S ;

Pak, EY ;

No, K .

LAB ON A CHIP, 2005, 5 (03) :270-279

[6] Highly Stable Liquid Metal-Based Pressure Sensor Integrated with a Microfluidic Channel [J].

Jung, Taekeon ;

Yang, Sung .

SENSORS, 2015, 15 (05) :11823-11835

[7] A microfluidic experimental platform with internal pressure measurements [J].

Kohl, MJ ;

Abdel-Khalik, SI ;

Jeter, SM ;

Sadowski, DL .

SENSORS AND ACTUATORS A-PHYSICAL, 2005, 118 (02) :212-221

[8] Multiplexed pressure sensing with elastomer membranes [J].

Orth, Antony ;

Schonbrun, Ethan ;

Crozier, Kenneth B. .

LAB ON A CHIP, 2011, 11 (22) :3810-3815

[9] Non-invasive measurement of the pressure distribution in a deformable micro-channel [J].

Ozsun, Ozgur ;

Yakhot, Victor ;

Ekinci, Kamil L. .

JOURNAL OF FLUID MECHANICS, 2013, 734 :R1

[10] A facile pressure drop measurement system and its applications to gas-liquid microflows [J].

Riaud, Antoine ;

Tostado, Chris P. ;

Wang, Kai ;

Luo, Guangsheng .

MICROFLUIDICS AND NANOFLUIDICS, 2013, 15 (05) :715-724

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