共 26 条
[5]
De Wolf Stefaan, 2012, Green, V2, P7, DOI 10.1515/green-2011-0018
[6]
Low dielectric constant, fluorine-doped SiO2 for intermetal dielectric
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1996, 14 (03)
:1124-1126
[7]
Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2012, 30 (04)