Preparation of Y2O3 thin films deposited by pulse ultrasonic spray pyrolysis

被引：29

作者：

Wang, SY ^{[1
]}

Lu, ZH ^{[1
]}

机构：

[1] SE Univ, Natl Lab Mol & Biomol Elect, Nanjing 210096, Peoples R China

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2003年 / 78卷 / 02期

关键词：

spray pyrolysis; yttrium oxide; thin film;

D O I：

10.1016/S0254-0584(02)00350-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of Y2O3 with a preferred (101) orientation were deposited by a spray pyrolysis method. Ethanol solution of yttrium acetylacetonate were ultrasonically nebulized and thermally decomposed onto Si(100) in the temperature range 350-400 degreesC. The films were characterized by X-ray diffraction, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. An appropriate ratio of pulse time to interval time between pulses was found to be necessary for obtaining homogeneous and uniform nanostructural Y2O3 thin films. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：542 / 545

页数：4

共 50 条

[41] Preparation of submicron- and nanometer-sized particles of Y2O3:Eu3+ by flame spray pyrolysis using ultrasonic and two-fluid atomizers
Purwanto, A
Lenggoro, IW
Chang, HW
Okuyama, K
JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 2006, 39 (01) : 68 - 76
[42] Synthesis and characterization of CeO2 thin films deposited by spray pyrolysis
J. de Souza
A. G. P. da Silva
H. R. Paes
Journal of Materials Science: Materials in Electronics, 2007, 18 : 951 - 956
[43] In2O3 films deposited by spray pyrolysis as a material for ozone gas sensors
Korotcenkov, G
Cerneavschi, A
Brinzari, V
Vasiliev, A
Ivanov, M
Cornet, A
Morante, J
Cabot, A
Arbiol, J
SENSORS AND ACTUATORS B-CHEMICAL, 2004, 99 (2-3) : 297 - 303
[44] Humidity Response of SnO2 Thin Films Deposited by Spray Pyrolysis
Tripathi, Aakhilesh
Pandey, Akhilesh
Shukla, R. K.
PROCEEDING OF INTERNATIONAL CONFERENCE ON RECENT TRENDS IN APPLIED PHYSICS & MATERIAL SCIENCE (RAM 2013), 2013, 1536 : 479 - +
[45] Photoluminescence Studies on Spray Pyrolysis Deposited ZnO-SnO2 Mixed Thin Films
Tharsika, T.
Haseeb, A. S. M. A.
Sabri, M. F. M.
MICRO/NANO SCIENCE AND ENGINEERING, 2014, 925 : 318 - +
[46] Morphological engineering of SnO2 and In2O3 films deposited by spray pyrolysis
Korotcenkov, G.
Tolstoy, V.
Brinzari, V.
BULLETIN OF MATERIALS SCIENCE, 2019, 42 (05)
[47] Thin films of SiO2 and hydroxyapatite on titanium deposited by spray pyrolysis
V. Jokanovic
B. Jokanovic
D. Izvonar
B. Dacic
Journal of Materials Science: Materials in Medicine, 2008, 19 : 1871 - 1879
[48] Preparation of ZrO2 and Al2O3 thin-films on stainless steel by spray pyrolysis
Novakovic, T.
Radic, N.
Grbic, B.
Stoychev, D.
Stefanov, P.
Marinova, T.
RESEARCH TRENDS IN CONTEMPORARY MATERIALS SCIENCE, 2007, 555 : 321 - +
[49] Morphology of zinc oxide thin films deposited by spray pyrolysis
Er, Ali Oguz
Farha, Ashraf Hassan
Gumus, Cebrail
Guneri, Emine
Ufuktepe, Yuksel
OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2011, 5 (12): : 1286 - 1291
[50] DMF effect on the morphology and the luminescence properties of Y2O3:Eu3+ red phosphor prepared by spray pyrolysis
Jung, Kyeong Youl
Kang, Yun Chan
Park, Young-Kwon
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY, 2008, 14 (02) : 224 - 229

← 1 2 3 4 5 →