Preparation of Y2O3 thin films deposited by pulse ultrasonic spray pyrolysis

被引：29
作者：
Wang, SY [1 ]
Lu, ZH [1 ]
机构：
[1] SE Univ, Natl Lab Mol & Biomol Elect, Nanjing 210096, Peoples R China
来源：
MATERIALS CHEMISTRY AND PHYSICS | 2003年 / 78卷 / 02期
关键词：
spray pyrolysis; yttrium oxide; thin film;
D O I：
10.1016/S0254-0584(02)00350-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin films of Y2O3 with a preferred (101) orientation were deposited by a spray pyrolysis method. Ethanol solution of yttrium acetylacetonate were ultrasonically nebulized and thermally decomposed onto Si(100) in the temperature range 350-400 degreesC. The films were characterized by X-ray diffraction, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. An appropriate ratio of pulse time to interval time between pulses was found to be necessary for obtaining homogeneous and uniform nanostructural Y2O3 thin films. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：542 / 545
页数：4
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