Conduction Behavior of V-SrZrO3 Thin Film Showing Resistive Switching

被引:6
作者
Lai, Chun-Hung [1 ]
Liu, Chih-Yi [2 ,3 ]
Tseng, Tseung-Yuen [4 ]
机构
[1] Natl United Univ, Dept Elect Engn, Miaoli 360, Taiwan
[2] Natl Kaohsiung Univ Appl Sci, Dept & Inst Elect Engn, Kaohsiung 807, Taiwan
[3] Natl Cheng Kung Univ, Ctr Micronano Sci & Technol, Tainan 70101, Taiwan
[4] Natl Taipei Univ Technol, Taipei 106, Taiwan
关键词
ELECTRICAL-PROPERTIES; BOTTOM ELECTRODES; DEFECT; MEMORY;
D O I
10.1080/00150190902886743
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper examines the electrical properties of V-doped SrZrO3 sputtered films showing bistable on/off resistive switching. The temperature dependence of dc sweep I-V data in the range of 25-100 degrees C implies the prominent role played by the off-state conduction in determining the R-switch ratio. The defects in off-state are investigated via Frenkel-Poole relation and the associated trap energy extraction. It is found that the oxygen vacancies are the possible major defects in off-state and are verified by the treatment of N-2 and O-2 annealing ambience hereafter. The nearly unchanged currents suggest the relatively more stable nature in on-state, which is consistent with the following findings: 1) the frequently observed I-V jiggle during on to off switching, 2) successful forming only found for sweep direction to on-state, 3) the better thermal disturbance immunity by longer retention for on-state, 4) the shorter pulse width needed to on-state switching for electric pulse induced resistance (EPIR) effect.
引用
收藏
页码:21 / 26
页数:6
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