Self-organization of thin metal films by irradiation with nanosecond laser pulses

被引:28
作者
Gedvilas, M. [1 ]
Voisiat, B. [1 ]
Raciukaitis, G. [1 ]
Regelskis, K. [1 ]
机构
[1] Inst Phys, Appl Res Lab, LT-02300 Vilnius, Lithuania
关键词
Laser ablation; Thin films; Metal on glass; Ripples; ABLATION;
D O I
10.1016/j.apsusc.2009.04.099
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Modifications in thin metal films under intensive laser irradiation were studied. Gold, silver, copper, chromium and aluminum films with the thickness of 100 nm were deposited on the glass substrate. Back- side irradiation through the substrate with a burst of nanosecond pulses tightly focused to a line was applied. The film removal threshold with a single pulse F-th was estimated for every material and laser fluence was kept above it in the range of 1.5-3 F-th during experiments. Diverse behavior of the films depending on the metal, the shift between pulses and laser fluence was observed. In chromium, the regular structures were developed in a quite wide range of processing parameters. In gold, three kinds of ripples were observed: transverse (similar to ripples in chromium), longitudinal and a structure of ripples oriented at 60 degrees to each other. The combination of physical properties facilitated the regular assembly of the molten metal in chromium and to some extent in gold. (C) 2009 Elsevier B. V. All rights reserved.
引用
收藏
页码:9826 / 9829
页数:4
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