Porosity reduction in inkjet-printed copper film by progressive sintering on nanoparticles

被引:21
作者
Chan, Hui-Ju [1 ]
Huang, Bo-Cin [1 ]
Wang, Li-Wen [1 ]
Liao, Kuan-Hsun [1 ]
Lo, Cheng-Yao [1 ,2 ]
机构
[1] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, 101,Sect 2,Kuang Fu Rd, Hsinchu 30013, Taiwan
[2] Natl Tsing Hua Univ, Dept Power Mech Engn, 101,Sect 2,Kuang Fu Rd, Hsinchu 30013, Taiwan
关键词
Adhesion; Copper; Nanoparticle; Near-infrared; Porosity; Sintering; INTENSE PULSED-LIGHT; FLEXIBLE SUBSTRATE; ELEMENTAL COPPER; CONDUCTIVITY; ELECTRONICS; MICROWAVE; PATTERN;
D O I
10.1016/j.tsf.2017.02.062
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This work demonstrates a progressive three-step sintering for inkjet-printed copper (Cu) nanoparticles. For the inkjet-printed Cu thin films, the proposed processes of sequential low-pressure drying, near-infrared sintering, and intense pulsed light (IPL) reduction ensure high nanoparticle compactness, complete Cu sintering, and low oxygen content, respectively. Experiments showed that the highest Cu conductivity resulted from a combination of 65.7% improvement on surface roughness, 37.3% porosity reduction, and 91.7% oxygen elimination provided by the proposed method. Enhanced adhesion between the Cu and the substrate confirmed by mechanical examinations indicated other benefits of this progressive sintering. In addition, the cracks that resulted from different thermal expansions in the Cu thin film and the substrate during IPL reduction were quantified, and the results explained the degraded electrical performance of the Cu thin films that had been processed beyond the optimal condition. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码:33 / 38
页数:6
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