BATCH-FABRICATED HIGH Q-FACTOR MICROCRYSTALLINE DIAMOND CYLINDRICAL RESONATOR

被引：0

作者：

Saito, Daisuke ^{[1
]}

Yang, Chen ^{[1
]}

Heidari, Amir ^{[2
]}

Najar, Hadi ^{[2
]}

Lin, Liwei ^{[1
]}

Horsley, David A. ^{[2
]}

机构：

[1] Univ Calif Berkeley, Berkeley, CA 94720 USA

[2] Univ Calif Davis, Davis, CA 95616 USA

来源：

2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) | 2015年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a 1.5 mm batch-fabricated polycrystalline diamond Cylindrical Resonator (CR) for gyroscope applications. The device is fabricated in a cylindrical shape using silicon on insulator (SOI) wafers and deep reactive ion etching (DRIE), which allows flexibility of choosing different geometries and materials for the resonator structure. A quality factor (Q) of 313,100 is measured at the 23 kHz 2 theta elliptical wineglass modes, producing a ring-down time of 4.32 seconds. Annealing CRs at 700 degrees C in a nitrogen atmosphere improved Q from 75,000 to over 300,000. The highly symmetric fabrication results in CRs with an excellent frequency mismatch of 3 Hz (130 ppm) between the 2 theta degenerate wineglass modes without applying any tuning voltage.

引用

页码：801 / 804

页数：4

共 9 条

[1]

Bernstein J., 2014, SOL STAT SENS ACT MI, P273

[2]

Cho J.Y., 2014, Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head), P103, DOI DOI 10.31438/TRF.HH2014

[3] Fused-Silica Micro Birdbath Resonator Gyroscope (μ-BRG) [J].

Cho, Jae Yoong ;

Woo, Jong-Kwan ;

Yan, Jialiang ;

Peterson, Rebecca L. ;

Najafi, Khalil .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2014, 23 (01) :66-77

[4] Hemispherical wineglass resonators fabricated from the microcrystalline diamond [J].

Heidari, Amir ;

Chan, Mei-Lin ;

Yang, Hsueh-An ;

Jaramillo, Gerardo ;

Taheri-Tehrani, Parsa ;

Fonda, Peter ;

Najar, Hadi ;

Yamazaki, Kazuo ;

Lin, Liwei ;

Horsley, David A. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2013, 23 (12)

[5]

Najar H, 2014, 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), P628, DOI 10.1109/MEMSYS.2014.6765719

[6] High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping [J].

Najar, Hadi ;

Chan, Mei-Lin ;

Yang, Hsueh-An ;

Lin, Liwei ;

Cahill, David G. ;

Horsley, David A. .

APPLIED PHYSICS LETTERS, 2014, 104 (15)

[7]

Perahia R., 2014, Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head), P383

[8]

RAGAN RR, 1984, IEEE T AERO ELEC SYS, V20, P414, DOI 10.1109/TAES.1984.4502062

[9]

Senkal D., 2014, Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head), P68

← 1 →