Molecular Momentum Transport at Fluid-Solid Interfaces in MEMS/NEMS: A Review

被引:289
作者
Cao, Bing-Yang [1 ]
Sun, Jun [1 ,2 ]
Chen, Min [1 ]
Guo, Zeng-Yuan [1 ]
机构
[1] Tsinghua Univ, Dept Engn Mech, Key Lab Thermal Sci & Power Engn, Minist Educ, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Inst Nucl & New Energy Technol, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
fluid-solid interfaces; molecular momentum transport; velocity slip; boundary conditions; momentum accommodation coefficient; micro/nanofluidics; molecular dynamics; VELOCITY SLIP COEFFICIENTS; GAS-SURFACE INTERACTION; SPINNING ROTOR GAUGE; FAST MASS-TRANSPORT; THIN LIQUID-FILMS; TANGENTIAL-MOMENTUM; BOUNDARY-CONDITIONS; ACCOMMODATION COEFFICIENTS; HYDROPHOBIC SURFACES; DYNAMICS SIMULATION;
D O I
10.3390/ijms10114638
中图分类号
Q5 [生物化学]; Q7 [分子生物学];
学科分类号
071010 ; 081704 ;
摘要
This review is focused on molecular momentum transport at fluid-solid interfaces mainly related to microfluidics and nanofluidics in micro-/nano-electromechanical systems (MEMS/NEMS). This broad subject covers molecular dynamics behaviors, boundary conditions, molecular momentum accommodations, theoretical and phenomenological models in terms of gas-solid and liquid-solid interfaces affected by various physical factors, such as fluid and solid species, surface roughness, surface patterns, wettability, temperature, pressure, fluid viscosity and polarity. This review offers an overview of the major achievements, including experiments, theories and molecular dynamics simulations, in the field with particular emphasis on the effects on microfluidics and nanofluidics in nanoscience and nanotechnology. In Section 1 we present a brief introduction on the backgrounds, history and concepts. Sections 2 and 3 are focused on molecular momentum transport at gas-solid and liquid-solid interfaces, respectively. Summary and conclusions are finally presented in Section 4.
引用
收藏
页码:4638 / 4706
页数:69
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