A transmission-line microwave interferometer for plasma electron density measurement

被引:12
作者
Chang, C. H. [1 ]
Hsieh, C. H. [1 ]
Wang, H. T. [1 ]
Jeng, J. Y. [1 ]
Leou, K. C. [1 ]
Lin, C. [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 300, Taiwan
关键词
D O I
10.1088/0963-0252/16/1/009
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
We present both the theoretical analysis and proof-of-principle experimental results of a novel transmission-line microwave interferometer for measurements of plasma electron density. The principle of this technique is the same as conventional microwave interferometers except that the sensing microwave propagates along a transmission- line structure. For this study, the transmission- line is a circular coaxial dielectric waveguide operated at 2.4 GHz. A microwave module consisting of a microwave source and a phase detector has also been developed for detecting the phase of the microwave propagating through the transmission- line. Good agreement of phase measurements between the microwave module and a microwave network analyser has been demonstrated. The electron density measured by the interferometer is also consistent with the results from a Langmuir probe.
引用
收藏
页码:67 / 71
页数:5
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