Technological and optical methods for increasing the spatial resolution of thermochemical laser writing on thin metal films

被引：9

作者：

Korolkov, Victor P. ^{[1
]}

Sedukhin, Andrey G. ^{[1
]}

Mikerin, Sergey L. ^{[1
]}

机构：

[1] SB RAS, Inst Automat & Electrometry, Koptyuga Ave 1, Novosibirsk 630090, Russia

来源：

OPTICAL AND QUANTUM ELECTRONICS | 2019年 / 51卷 / 12期

基金：

俄罗斯科学基金会;

关键词：

Thermochemical laser writing; Non-destructive through-oxidation; Spatial resolution; Metal films; Diffractive structures; RADIAL POLARIZATION; OXIDATION; NEEDLE; LIGHT; FIELD;

D O I：

10.1007/s11082-019-2111-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Various techniques, effects, and factors are examined that enable one to increase the spatial resolution of thermochemical direct laser writing on thin metal films. A few specific conditions of experimental laser processing with the focused beam of a CW green laser are investigated therewith. One of the goals of this work was to find a suitable metal and its thickness that would make it possible to implement the through-oxidation regime. When properly adjusting a value of laser exposure, this regime was found to be very useful for increasing the spatial resolution of the laser writing. This is due to bleaching of an oxidized film near the peak of a focused laser spot. Apart from the experimental results concerning the technology of laser processing of the metal films, in this work, there are also considered some ways of reducing a focused spot size used for the direct laser writing.

引用

页数：10

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