Copper plating from citrate baths:: The role of complexation chemistry

被引:0
作者
Henninot, C [1 ]
Vallières, C [1 ]
Rode, S [1 ]
Matlosz, M [1 ]
机构
[1] CNRS, Lab Sci Genie Chim, INPL, Grp ENSIC, F-54001 Nancy, France
来源
ELECTROCHEMICAL TECHNOLOGY APPLICATIONS IN ELECTRONICS III | 2000年 / 99卷 / 34期
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中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
An experimental and theoretical study of the influence of solution chemistry on the electrodeposition of copper from complexing citrate baths is proposed and discussed. The behavior of the system is described in terms of the relative distribution of various copper-citrate complexes, combined with a model mechanism for electrodeposition kinetics involving an adsorbed blocking intermediate. Studies of partial-current polarization curves for copper deposition over a wide range of pH substantiate the mechanism and offer convincing evidence for the significant role of solution chemistry in the electro-reduction process. In addition to the copper system, the mechanism proposed offers a framework that may be useful for the study of other metals and alloys electrodeposited from complexing baths containing citrate and citrate-like molecules.
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页码:333 / 339
页数:7
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