A high sensitivity resonator pressure sensor

We propose a new resonator pressure sensor using shallow shells. The sensor has high sensitivity due to the shallow shell structure. A theoretical analysis is performed using the theory for small fields superposed on finite biasing fields in an elastic body. The analysis shows that shallow shells have a magnifying effect on sensor sensitivity. Sensitivity of a quartz plate thickness-shear resonator pressure sensor is calculated as an example. The idea can be applied to acoustic wave pressure sensors operating with other waves or vibration modes. (C) 2002 Elsevier Science B.V. All rights reserved.