Precipitates originating from tungsten crucible parts in AlN bulk crystals grown by the PVT method

被引:9
作者
Langhans, Frank [1 ]
Kiefer, Stefan [2 ]
Hartmann, Carsten [1 ]
Markurt, Toni [1 ]
Schulz, Tobias [1 ]
Guguschev, Christo [1 ]
Naumann, Martin [1 ]
Kollowa, Sandro [1 ]
Dittmar, Andrea [1 ]
Wollweber, Juergen [1 ]
Bickermann, Matthias [1 ]
机构
[1] Leibniz Inst Crystal Growth Berlin, Max Born Str 2, D-12489 Berlin, Germany
[2] Univ Jena, Inst Geosci, Carl Zeiss Promenade 10, D-07745 Jena, Germany
关键词
aluminum nitride; precipitate; tungsten carbide; TEM; EPMA; LIGHT-EMITTING-DIODES; LOW-OXYGEN CONTENT; SINGLE-CRYSTALS; SCATTERING TOMOGRAPHY; WATER DISINFECTION; SUBSTRATE; DEFECTS;
D O I
10.1002/crat.201500201
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In order to evaluate the possible involvement of crucible materials in the growth of AlN bulk crystals grown by physical vapor transport, we applied growth conditions with a high vertical thermal gradient and hence high supersaturation of aluminum vapor. Under these conditions, precipitates formed causing diffuse grayish substructures at the initial growth interface and in the crystal body, decorating dislocations. Electron microscopy studies revealed that the precipitates are elongated, single-phase particles with sizes of 50-500 nm of commensurate structure, oriented along the <11<(2)over bar>0> direction. Chemical analysis of the precipitates showed tungsten as well as carbon and oxygen. The lattice parameters of the precipitates are in close agreement to hexagonal tungsten hemicarbide (W2C). The possible transport from the tungsten parts and its conversion into tungsten hemicarbide precipitates is discussed. We thus conclude that the W2C precipitates may contribute to the decoration of dislocations, even in growth with moderate thermal gradients.
引用
收藏
页码:129 / 136
页数:8
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