High-power AlGaInAs/GaAs microstack laser bars

被引:6
作者
Hanke, C [1 ]
Korte, L [1 ]
Acklin, B [1 ]
Behringer, M [1 ]
Herrmann, G [1 ]
Luft, J [1 ]
De Odorico, B [1 ]
Marchiano, M [1 ]
Wilhelmi, J [1 ]
机构
[1] Infineon Technol Corp Res, Munich, Germany
来源
IN-PLANE SEMICONDUCTOR LASERS IV | 2000年 / 3947卷
关键词
semiconductor laser arrays; InGaAlAs; micro-stack; tunnel junction; high power; qcw operation;
D O I
10.1117/12.382106
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The maximum useful optical power of laser bars is limited due to thermal and lifetime constraints to typical values of 50 W/cm cw or 120 W/cm qcw. A promising new approach is the so-called microstack laser in which several laseractive areas are integrated vertically in the same monolithic structure. In order to drive these structures in series with high efficiency low-resistance tunnel-junctions have to be realized. By optimizing the MOVPE growth process tunnel-junctions with a specific differential resistivity of 2.5x10(-4) Omega cm(2) could be obtained, which are suitable for the monolithic inter-connection of laser structures. We realized microstack lasers with two and three active zones for the 800 nm and 900 nm band in the InGaAlAs/GsAs-system using conventional LOC-SCH-structures. Compared to reference lasers with only one laser active structure a slight increase in threshold current can be observed, which is attributed to an increased current spreading due to the highly conducting tunnel junction. The W-characteristics show turn-on voltages corresponding to the number of active layers and there is no significant additional potential barrier due to the tunnel-junctions detectable. The differential efficiency scales with the number of laser junctions. AR/HR coated lasers with two or three junctions show efficiencies at 800 nm of 2.2 W/A and 3.1 W/A respectively. Mounted I cm-laserbars with an asymmetrically coated double microstack-structure have been operated up to 95 W cw and 240 W qcw with 20% duty cycle. Due to the high slope efficiency (2.1 W/A) and the low series resistance the wallplug efficiency exceeds 50 %. qcw-lifetests at 210 W with 20 % duty-cycle showed only small degradation up to 5 Gshot.
引用
收藏
页码:50 / 57
页数:8
相关论文
共 2 条
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