Sheath structure of an electronegative plasma with cold positive ions

被引:18
作者
Li, M [1 ]
Vyvoda, MA [1 ]
Dew, SK [1 ]
Brett, MJ [1 ]
机构
[1] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA
关键词
electronegative plasmas; sheath structure; sheath thickness;
D O I
10.1109/27.842914
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The one-dimensional collisionless sheath model of electropositive plasmas is extended here to study the sheath structure of an electronegative plasma at steady state with the assumptions of cold positive ions and planar sheath configurations, Similar to the electropositive plasma sheath, a net charge layer is built within the sheath. However, the net charge density distribution within the sheath is sensitive to the plasma electronegativity (ratio of negative ion density n(-b) to the electron density n(eb)), It is most interesting that the sheath thickness varies nonmonotonically with the plasma electronegativity of the bulk plasma. Last, the effects of applied wall potential and temperature ratio of electrons to negative ions are discussed.
引用
收藏
页码:248 / 252
页数:5
相关论文
共 20 条
[1]   The double sheath associated with electron emission into a plasma containing negative ions [J].
Amemiya, H ;
Annaratone, BM ;
Allen, JE .
JOURNAL OF PLASMA PHYSICS, 1998, 60 :81-93
[2]   PLASMAS WITH NEGATIVE-IONS - PROBE MEASUREMENTS AND CHARGE EQUILIBRIUM [J].
AMEMIYA, H .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1990, 23 (08) :999-1014
[3]   SHEATH EVOLUTION IN A NEGATIVE-ION PLASMA [J].
AMIN, A ;
AOSSEY, D ;
NGUYEN, BT ;
KIM, HS ;
COONEY, JL ;
LONNGREN, KE .
PHYSICS OF FLUIDS B-PLASMA PHYSICS, 1993, 5 (10) :3813-3818
[4]   THE OPERATION OF LANGMUIR PROBES IN ELECTRO-NEGATIVE PLASMAS [J].
BOYD, RLF ;
THOMPSON, JB .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1959, 252 (1268) :102-119
[5]   BOUNDARIES AND PROBES IN ELECTRONEGATIVE PLASMAS [J].
BRAITHWAITE, NS ;
ALLEN, JE .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (12) :1733-1737
[6]  
Chapman B., 1980, GLOW DISCHARGE PROCE, DOI DOI 10.1063/1.2914660
[7]   SHEATH STRUCTURE AROUND PARTICLES IN LOW-PRESSURE DISCHARGES [J].
DAUGHERTY, JE ;
PORTEOUS, RK ;
KILGORE, MD ;
GRAVES, DB .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (09) :3934-3942
[8]   INFLUENCE OF NEGATIVE-IONS ON THE PLASMA BOUNDARY SHEATH [J].
DEUTSCH, R ;
RAUCHLE, E .
PHYSICAL REVIEW A, 1992, 46 (06) :3442-3453
[9]   ELECTRICAL CHARACTERISTICS OF PARALLEL-PLATE RF DISCHARGES IN ARGON [J].
GODYAK, VA ;
PIEJAK, RB ;
ALEXANDROVICH, BM .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (04) :660-676
[10]   CONTINUUM MODELING OF RADIOFREQUENCY GLOW-DISCHARGES .1. THEORY AND RESULTS FOR ELECTROPOSITIVE AND ELECTRONEGATIVE GASES [J].
GOGOLIDES, E ;
SAWIN, HH .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (09) :3971-3987