Antireflective properties of flowerlike alumina thin films on soda-lime silica glass substrates prepared by the sol-gel method with hot water treatment

被引:34
作者
Yamaguchi, Naoko [1 ]
Tadanaga, Kiyoharu
Matsuda, Atsunori
Minami, Tsutomu
Tatsumisago, Masahiro
机构
[1] Osaka Prefecture Univ, Grad Sch Engn, Dept Appl Chem, Sakai, Osaka 5998531, Japan
[2] Toyohashi Univ Technol, Dept Mat Sci, Toyohashi, Aichi 4418580, Japan
关键词
aluminium oxide; anti-reflection; hot water treatment; nanocrystals; optical properties; pseudoboehmite; sol-gel process;
D O I
10.1016/j.tsf.2006.11.009
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The antireflective (AR) properties of Al(2)O(3) thin films with small roughness on soda-lime silica glass substrates were investigated. By immersing porous Al(2)O(3) thin films in hot water, nanocrystals of pseudoboehmite were formed on the film surface. The reflectance of the Al(2)O(3) films treated with hot water for 30 min was less than 0.5% in the wavelength region of 360-620 nm. The Al(2)O(3) films with small roughness resulting from the hot water treatment become denser from their surface to the interface with the substrate, and the refractive index gradient brought by the structure results in excellent AR properties. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:3914 / 3917
页数:4
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