Development of cylindrical two-dimensional linear oscillatory actuator

被引：1

作者：

Honda, Yukari ^{[1
]}

Torii, Susumu ^{[1
]}

Ebihara, Daiki ^{[2
]}

Hasegawa, Yuya ^{[3
]}

Hirata, Katsuhiro ^{[4
]}

机构：

[1] Musashi Inst Technol, Dept Elect & Elect Engn, Setagaya Ku, 1-28-1 Tamazutsumi, Tokyo 1588557, Japan

[2] Goto Ikueikai Educat Fundat, Tokyo, Japan

[3] Analyt Evaluat & Reliabil Technol Ctr Matsushita, Kadoma, Osaka, Japan

[4] Osaka Univ, Dept Elect & Elect Engn, 2-2 Yamadaoka, Suita, Osaka 5650871, Japan

来源：

2006 INTERNATIONAL SYMPOSIUM ON POWER ELECTRONICS, ELECTRICAL DRIVES, AUTOMATION AND MOTION, VOLS 1-3 | 2006年

关键词：

two-dimensional; oscillatory actuator; attractive force;

D O I：

10.1109/SPEEDAM.2006.1649781

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In the industrial world, the actuator that carries out a multi-dimension drive and simple structure is rapidly performed. The actuator that operates the direction of z-theta is needed in the manufacturing processes such as semiconductors and the liquid crystals. In this paper, the construction of the two-dimensional oscillatory actuator with magnetic attractive force is proposed and designed. The basic characteristics of the flux density are measured to analyze this actuator.

引用

页码：260 / +

页数：2