Diamond-like carbon metal-semiconductor-metal switches for active matrix displays

被引：33

作者：

Egret, S

Robertson, J

Milne, WI

Clough, FJ

机构：

[1] UNIV CAMBRIDGE,DEPT ENGN,CAMBRIDGE CB2 1PZ,ENGLAND

[2] DE MONTFORT UNIV,EMERGING TECHNOL GRP,LEICESTER LE1 9BH,LEICS,ENGLAND

来源：

关键词：

DLC; applications; a-C; H; electrical properties;

D O I：

10.1016/S0925-9635(96)00676-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Metal-Semiconductor-Metal (MSM) layer structures of diamond-like carbon (DLC) are investigated for possible use as the switching elements in active matrix displays. Their high field conductivity is found to obey the Poole-Frenkel law for field-assisted hopping out of traps. The conduction parameters are studied as a function of the band gap of diamond-like carbon. The on- and off-currents of DLC MSM switches are compared to those of the presently used amorphous silicon nitride MSMs. (C) 1997 Elsevier Science S.A.

引用

页码：879 / 883

页数：5

共 9 条

[1] Frenkel J, 1938, PHYS REV, V54, P647, DOI 10.1103/PhysRev.54.647
[2] POOLE-FRENKEL CONDUCTION IN AMORPHOUS SOLIDS
HILL, RM
[J]. PHILOSOPHICAL MAGAZINE, 1971, 23 (181): : 59 - &
[3] KNAPP AG, 1993, SID DIGEST 93, P379
[4] LAMB DR, 1967, ELECTRICAL CONDUCTIO
[5] LEUDER E, 1995, MATER RES SOC S P, V377, P847
[6] OHTA E, 1990, SSDM, V22, P589
[7] ROBERTSON J, 1986, ADV PHYS, V35, P317, DOI 10.1080/00018738600101911
[8] SHANNON JM, 1993, MATER RES SOC SYMP P, V297, P987, DOI 10.1557/PROC-297-987
[9] SHANNON JM, 1995, ITG FACHBEREIT VACUU, V132, P291

← 1 →