Growth of well-aligned carbon nanotubes on a large area of Co-Ni co-deposited silicon oxide substrate by thermal chemical vapor deposition

被引:56
作者
Lee, CJ [1 ]
Park, J
Kang, SY
Lee, JH
机构
[1] Kunsan Natl Univ, Sch Elect Engn, Kunsan 573701, South Korea
[2] Korea Univ, Dept Chem, Jochiwon 339700, South Korea
[3] ETRI, Microelect Labs, Next Semicond Res Dept, Taejon 305350, South Korea
关键词
D O I
10.1016/S0009-2614(00)00521-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have grown vertically well-aligned multiwalled carbon nanotubes (CNT) on a large area of cobalt-nickel (Co-Ni) co-deposited silicon oxide substrate by thermal chemical vapor deposition using C2H2 gas, at 950 degrees C. The diameter of CNTs is in the range of 50-120 nm and the length is about 130 mu m. The grown CNTs have a bamboo structure and closed tip with no catalytic particles inside. As the particle size of Co-Ni catalyst decreases, the vertical alignment is enhanced. The CNTs exhibits a low turn-on voltage of 0.8 V/mu m with an emission current density of 0.1 mu A cm(-2). (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:554 / 559
页数:6
相关论文
共 17 条
[1]   COBALT-CATALYZED GROWTH OF CARBON NANOTUBES WITH SINGLE-ATOMIC-LAYERWALLS [J].
BETHUNE, DS ;
KIANG, CH ;
DEVRIES, MS ;
GORMAN, G ;
SAVOY, R ;
VAZQUEZ, J ;
BEYERS, R .
NATURE, 1993, 363 (6430) :605-607
[2]   Self-oriented regular arrays of carbon nanotubes and their field emission properties [J].
Fan, SS ;
Chapline, MG ;
Franklin, NR ;
Tombler, TW ;
Cassell, AM ;
Dai, HJ .
SCIENCE, 1999, 283 (5401) :512-514
[3]   SINGLE-SHELL CARBON NANOTUBES OF 1-NM DIAMETER [J].
IIJIMA, S ;
ICHIHASHI, T .
NATURE, 1993, 363 (6430) :603-605
[4]   HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].
IIJIMA, S .
NATURE, 1991, 354 (6348) :56-58
[5]   Large-scale production of single-walled carbon nanotubes by the electric-arc technique [J].
Journet, C ;
Maser, WK ;
Bernier, P ;
Loiseau, A ;
delaChapelle, ML ;
Lefrant, S ;
Deniard, P ;
Lee, R ;
Fischer, JE .
NATURE, 1997, 388 (6644) :756-758
[6]   Observation of the out-of-plane mode in the Raman scattering from the graphite edge plane [J].
Kawashima, Y ;
Katagiri, G .
PHYSICAL REVIEW B, 1999, 59 (01) :62-64
[7]  
LEE CF, UNPUB
[8]   Synthesis of uniformly distributed carbon nanotubes on a large area of Si substrates by thermal chemical vapor deposition [J].
Lee, CJ ;
Kim, DW ;
Lee, TJ ;
Choi, YC ;
Park, YS ;
Kim, WS ;
Lee, YH ;
Choi, WB ;
Lee, NS ;
Kim, JM ;
Choi, YG ;
Yu, SC .
APPLIED PHYSICS LETTERS, 1999, 75 (12) :1721-1723
[9]   Synthesis of aligned carbon nanotubes using thermal chemical vapor deposition [J].
Lee, CJ ;
Kim, DW ;
Lee, TJ ;
Choi, YC ;
Park, YS ;
Lee, YH ;
Choi, WB ;
Lee, NS ;
Park, GS ;
Kim, JM .
CHEMICAL PHYSICS LETTERS, 1999, 312 (5-6) :461-468
[10]   Large-scale synthesis of aligned carbon nanotubes [J].
Li, WZ ;
Xie, SS ;
Qian, LX ;
Chang, BH ;
Zou, BS ;
Zhou, WY ;
Zhao, RA ;
Wang, G .
SCIENCE, 1996, 274 (5293) :1701-1703