Array detector for the atomic force microscope

被引:8
|
作者
Schäffer, TE [1 ]
Richter, M
Viani, MB
机构
[1] Max Planck Inst Biophys Chem, Dept Mol Biol, D-37077 Gottingen, Germany
[2] Univ Calif Santa Barbara, Dept Phys, Santa Barbara, CA 93106 USA
关键词
D O I
10.1063/1.126734
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present a method for measuring the deflection of the optical beam in an atomic force microscope (AFM) that yields an increased signal-to-noise ratio, compared to the conventional two-segment detection. This increase is achieved by distributing the optical power from the beam across an array of photodetector segments and splitting it into multiple channels. Each channel has an adjustable gain factor that is set dynamically to weigh the contribution from each channel. We find a mathematical condition for the gain factors that allows detection of cantilever deflections with maximum signal-to-noise ratio and demonstrate this for the case of a 12-mu m-long cantilever in an AFM for small cantilevers. (C) 2000 American Institute of Physics. [S0003-6951(00)05024-5].
引用
收藏
页码:3644 / 3646
页数:3
相关论文
共 50 条
  • [1] Array detector for the atomic force microscope
    Schaffer, Tilman E.
    Richter, Michael
    Viani, Mario B.
    2000, American Institute of Physics Inc. (76)
  • [2] Multiscale model for atomic force microscope array mechanical behavior
    Lenczner, M.
    APPLIED PHYSICS LETTERS, 2007, 90 (09)
  • [3] Atomic force microscope cantilever array for parallel lithography of quantum devices
    Kakushima, K. (kaku@fujita3.iis.u-tokyo.ac.jp), 1600, Japan Society of Applied Physics (43):
  • [4] Atomic force microscope
    不详
    MICRO, 1995, 13 (10): : 22 - 22
  • [5] THE ATOMIC FORCE MICROSCOPE
    GOH, MC
    MARKIEWICZ, P
    CHEMISTRY & INDUSTRY, 1992, (18) : 687 - 691
  • [6] Atomic force microscope cantilever array for parallel lithography of quantum devices
    Kakushima, K
    Watanabe, T
    Shimamoto, K
    Gouda, T
    Ataka, M
    Mimura, H
    Isono, Y
    Hashiguchi, G
    Mihara, Y
    Fujita, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (6B): : 4041 - 4044
  • [7] ATOMIC FORCE MICROSCOPE
    TSUDA, N
    INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING, 1991, 25 (04): : 253 - 258
  • [8] Atomic force microscope
    不详
    MICRO, 1995, 13 (02): : 46 - 46
  • [9] ATOMIC FORCE MICROSCOPE
    BINNIG, G
    QUATE, CF
    GERBER, C
    PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
  • [10] ATOMIC RESOLUTION WITH ATOMIC FORCE MICROSCOPE
    BINNIG, G
    GERBER, C
    STOLL, E
    ALBRECHT, TR
    QUATE, CF
    SURFACE SCIENCE, 1987, 189 : 1 - 6