Accumulation hole layer in p-GaN/AlGaN heterostructures

被引:55
作者
Shur, MS
Bykhovski, AD
Gaska, R [1 ]
Yang, JW
Simin, G
Khan, MA
机构
[1] Rensselaer Polytech Inst, Ctr Integrated Elect & Elect Mfg, Troy, NY 12180 USA
[2] Rensselaer Polytech Inst, Dept Elect Comp & Syst Engn, Troy, NY 12180 USA
[3] Univ S Carolina, Dept Elect & Comp Engn, Columbia, SC 29208 USA
关键词
D O I
10.1063/1.126579
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present the results on piezoelectric and pyroelectric doping in AlGaN-on-GaN and GaN-on-AlGaN heterostructures and demonstrate p-GaN/AlGaN structures with accumulation hole layer. Our results indicate that polarization charge can induce up to 5x10(13) cm(-2) holes at the AlGaN/GaN heterointerfaces. We show that the transition from three-dimensional (3D) to two-dimensional (2D) hole gas can be only achieved for hole sheet densities on the order of 10(13) cm(-2) or higher. At lower densities, only 3D-hole accumulation layer may exist. These results suggest that a piezoelectrically induced 2D-hole gas can be used for the reduction of the base spreading resistance in AlGaN/GaN-based heterostructure bipolar transistors. (C) 2000 American Institute of Physics. [S0003-6951(00)00421-6].
引用
收藏
页码:3061 / 3063
页数:3
相关论文
共 4 条
[1]   Spontaneous polarization and piezoelectric constants of III-V nitrides [J].
Bernardini, F ;
Fiorentini, V ;
Vanderbilt, D .
PHYSICAL REVIEW B, 1997, 56 (16) :10024-10027
[2]   Elastic strain relaxation and piezoeffect in GaN-AlN, GaN-AlGaN and GaN-InGaN superlattices [J].
Bykhovski, AD ;
Gelmont, BL ;
Shur, MS .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (09) :6332-6338
[3]   AlGaN GaN heterojunction bipolar transistor [J].
McCarthy, LS ;
Kozodoy, P ;
Rodwell, MJW ;
DenBaars, SP ;
Mishra, UK .
IEEE ELECTRON DEVICE LETTERS, 1999, 20 (06) :277-279
[4]  
Wood Cohn, COMMUNICATION