SAW Sensors for Chemical Vapors and Gases

被引：210
作者：
Devkota, Jagannath [1 ,2 ]
Ohodnicki, Paul R. [1 ,2 ]
Greve, David W. [1 ,3 ]
机构：
[1] Natl Energy Technol Lab, Pittsburgh, PA 15236 USA
[2] Carnegie Mellon Univ, Dept Mat Sci & Engn, Pittsburgh, PA 15213 USA
[3] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA
来源：
SENSORS | 2017年 / 17卷 / 04期
基金：
美国能源部;
关键词：
acoustic waves; acoustoelectric effect; interdigital transducer; mass loading; piezoelectric effect; radiofrequency; sensing layer; viscoelasticity; ACOUSTIC-WAVE DEVICES; CARBON-DIOXIDE; HYDROGEN DETECTION; SENSING PROPERTIES; SENSITIVE LAYERS; NH3; GAS; FILM; POLYMER; ARRAY; WIRELESS;
D O I：
10.3390/s17040801
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Surface acoustic wave (SAW) technology provides a sensitive platform for sensing chemicals in gaseous and fluidic states with the inherent advantages of passive and wireless operation. In this review, we provide a general overview on the fundamental aspects and some major advances of Rayleigh wave-based SAW sensors in sensing chemicals in a gaseous phase. In particular, we review the progress in general understanding of the SAW chemical sensing mechanism, optimization of the sensor characteristics, and the development of the sensors operational at different conditions. Based on previous publications, we suggest some appropriate sensing approaches for particular applications and identify new opportunities and needs for additional research in this area moving into the future.
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页数：28
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