Characteristics of Ti-Nb, Ti-Zr and Ti-Al containing hydrogenated carbon nitride films

被引：13

作者：

Balaceanu, M. ^{[1
]}

Braic, V. ^{[1
]}

Braic, M. ^{[1
]}

Vladescu, A. ^{[1
]}

Zoita, C. N. ^{[1
]}

Grigorescu, C. E. A. ^{[1
]}

Grigore, E. ^{[2
]}

Ripeanu, R. ^{[3
]}

机构：

[1] Natl Inst Optoelect, Magurele 077125, Romania

[2] Natl Inst Laser Plasma & Radiat Phys, Magurele 077125, Romania

[3] Petr Gas Univ Ploiesti, RO-100680 Ploiesti, Romania

来源：

SOLID STATE SCIENCES | 2009年 / 11卷 / 10期

关键词：

Nanocomposite Me-C-N:H coatings; Cathodic arc deposition; Microchemical and mechanical characteristics; MECHANICAL-PROPERTIES; C-H; THIN-FILMS; COATINGS; MICROSTRUCTURE; PERFORMANCE; DEPOSITION; BIAS; MO;

D O I：

10.1016/j.solidstatesciences.2008.12.001

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

Nanocomposite Me-C-N:H coatings (Me is TiNb, TiZr or TiAl), with relatively high non-metal/metal ratios, were prepared by cathodic arc method using TiNb, TiZr and TiAl alloy cathodes in a CH4 + N-2 atmosphere. For comparison purposes, a-C-N:H films were also produced through evaporating a graphite cathode in a similar atmosphere. The films were characterized in terms of elemental and phase compositions, chemical bonds, texture, hardness, adhesion and friction behavior by GDOES, XPS, Raman spectroscopy and XRD techniques, surface profilometry, hardness and scratch adhesion measurements, and tribological tests. The nanocomposite films consisted of a mixture of crystalline metal carbonitride and amorphous carbon nitride. The non-metal/metal ratio in the films composition was found to range between 1.8 and 1.9. For the metal containing namocomposites, grain size in the range 7-23 nm, depending on the metal nature, were determined. As compared with the a-C-N:H, the Me-C-N:H films exhibited a much higher hardness (up to about 39 GPa for Ti-Zr-C-N:H) and a better adhesion strength, while the coefficients of friction were somewhat higher (0.2-0.3 for Me-C-N:H and 0.1 for a-C-N:H). Crown Copyright (C) 2008 Published by Elsevier Masson SAS. All rights reserved.

引用

页码：1773 / 1777

页数：5

共 31 条

[1] Deposition and characterization of Ti- and W-containing diamond-like carbon films by plasma source ion implantation [J].