GaN grown on (111) single crystal diamond substrate by molecular beam epitaxy

被引:27
作者
Dussaigne, A. [1 ]
Malinverni, M. [1 ]
Martin, D. [1 ]
Castiglia, A. [1 ]
Grandjean, N. [1 ]
机构
[1] Ecole Polytech Fed Lausanne, IPEQ, CH-1015 Lausanne, Switzerland
基金
瑞士国家科学基金会;
关键词
Molecular beam epitaxy; Diamond; Nitrides; High power electronics; ALGAN/GAN HEMTS; 0001; SAPPHIRE; OPTIMIZATION; LUMINESCENCE; GANHEMTS;
D O I
10.1016/j.jcrysgro.2009.08.018
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
GaN epilayers are grown on (111) oriented single crystal diamond substrate by ammonia-source molecular beam epitaxy. Each step of the growth is monitored in situ by reflection high energy electron diffraction. It is found that a two-dimensional epitaxial wurtzite GaN film is obtained. The surface morphology is smooth: the rms roughness is as low as 1.3 nm for 2 x 2 mu m(2) scan. Photoluminescence measurements reveal pretty good optical properties. The GaN band edge is centred at 3.469 eV with a linewidth of 5 meV. These results demonstrate that GaN heteroepitaxially grown on diamond opens new rooms for high power electronic applications. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:4539 / 4542
页数:4
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