Towards monolithic integration of germanium light sources on silicon chips

被引:49
作者
Saito, Shinichi [1 ]
Al-Attili, Abdelrahman Zaher [1 ]
Oda, Katsuya [2 ]
Ishikawa, Yasuhiko [3 ]
机构
[1] Univ Southampton, Fac Phys Sci & Engn, Zepler Inst, Nanoelect & Nanotechnol Res Grp,Elect & Comp Sci, Southampton SO17 1BJ, Hants, England
[2] Hitachi Ltd, Res & Dev Grp, 1-280 Higashi Koigakubo, Kokubunji, Tokyo 1858601, Japan
[3] Univ Tokyo, Grad Sch Engn, Dept Mat Engn, Tokyo, Japan
基金
英国工程与自然科学研究理事会;
关键词
germanium; silicon; photonics; electronics; CMOS; light source; monolithic integration; CHEMICAL-VAPOR-DEPOSITION; ROOM-TEMPERATURE; GE LAYERS; BAND-GAP; OPTICAL GAIN; GOI LAYERS; SI; EMISSION; LASER; PHOTONICS;
D O I
10.1088/0268-1242/31/4/043002
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Germanium (Ge) is a group-IV indirect band gap semiconductor, and therefore bulk Ge cannot emit light efficiently. However, the direct band gap energy is close to the indirect one, and significant engineering efforts are being made to convert Ge into an efficient gain material monolithically integrated on a Si chip. In this article, we will review the engineering challenges of developing Ge light sources fabricated using nano-fabrication technologies compatible with complementary metal-oxide-semiconductor processes. In particular, we review recent progress in applying high-tensile strain to Ge to reduce the direct band gap. Another important technique is doping Ge with donor impurities to fill the indirect band gap valleys in the conduction band. Realization of carrier confinement structures and suitable optical cavities will be discussed. Finally, we will discuss possible applications of Ge light sources in potential photonics-electronics convergent systems.
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页数:19
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