Surface metrology

被引：167
作者：
Whitehouse, DJ
机构：
[1] Department of Engineering, University of Warwick
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 1997年 / 8卷 / 09期
关键词：
D O I：
10.1088/0957-0233/8/9/002
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Some important types of instrumentation for measuring surfaces both past and present are reviewed. Exhaustive lists of instruments and performance are not presented; rather more emphasis is placed on the philosophy of measurement. An attempt is made to classify the surface features and also the function of surfaces as a pre-requisite to measurement. It is revealed that, as the push towards miniaturization is being taken beyond the nanometrology scale, some theoretical restrictions are likely to be encountered.
引用
收藏
页码：955 / 972
页数：18
相关论文
共 59 条
[1]  
[Anonymous], 1991, THEORY WAVE SCATTERI
[2]  
[Anonymous], 1990, TRIBOLOGY MECH MAGNE
[3]  
[Anonymous], SURFACE FINISH
[4]   ELASTIC DEFORMATION AND THE LAWS OF FRICTION [J].
ARCHARD, JF .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1957, 243 (1233) :190-205
[5]  
BASS FG, 1963, WAVE SCATTERING STAT
[6]  
Beckmann P., 1963, The Scattering of ElectromagneticWaves from Rough Surfaces
[7]  
BENNETT J, 1994, INTRO SURFACE ROUGHN
[8]   STATISTICAL PROPERTIES OF ECHOES DIFFRACTED FROM ROUGH SURFACES [J].
BERRY, MV .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1973, 273 (1237) :611-654
[9]   ATOMIC FORCE MICROSCOPE [J].
BINNIG, G ;
QUATE, CF ;
GERBER, C .
PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933
[10]   FORCE MICROSCOPY [J].
BINNIG, G .
ULTRAMICROSCOPY, 1992, 42 :7-15
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