Femtosecond and picosecond laser drilling of metals at high repetition rates and average powers

被引：205

作者：

Ancona, A. ^{[1
,2
]}

Doering, S. ^{[1
]}

Jauregui, C. ^{[1
]}

Roeser, F. ^{[1
]}

Limpert, J. ^{[1
]}

Nolte, S. ^{[1
]}

Tuennermann, A. ^{[1
,3
]}

机构：

[1] Univ Jena, Inst Appl Phys, D-07743 Jena, Germany

[2] CNR, INFM, Reg Lab LIT, I-70126 Bari, Italy

[3] Fraunhofer Inst Appl Opt & Precis Engn IOF, D-07745 Jena, Germany

来源：

OPTICS LETTERS | 2009年 / 34卷 / 21期

关键词：

ABLATION; PULSES; TRANSITION; TARGETS; SYSTEM;

D O I：

10.1364/OL.34.003304

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The influence of pulse duration on the laser drilling of metals at repetition rates of up to 1 MHz and average powers of up to 70 W has been experimentally investigated using an ytterbium-doped-fiber chirped-pulse amplification system with pulses from 800 fs to 19 ps. At a few hundred kilohertz particle shielding causes an increase in the number of pulses for breakthrough, depending on the pulse energy and duration. At higher repetition rates, the heat accumulation effect overbalances particle shielding, but significant melt ejection affects the hole quality. Using femtosecond pulses, heat accumulation starts at higher repetition rates, and the ablation efficiency is higher compared with picosecond pulses. (C) 2009 Optical Society of America

引用

页码：3304 / 3306

页数：3

共 15 条

[1] High speed laser drilling of metals using a high repetition rate, high average power ultrafast fiber CPA system [J].

Ancona, A. ;

Roeser, F. ;

Rademaker, K. ;

Limpert, J. ;

Nolte, S. ;

Tuennermann, A. .

OPTICS EXPRESS, 2008, 16 (12) :8958-8968

[2]

Chichkov BN, 1996, APPL PHYS A-MATER, V63, P109, DOI 10.1007/BF01567637

[3] Pulse width effect in ultrafast laser processing of materials [J].

Chien, CY ;

Gupta, MC .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 81 (06) :1257-1263

[4] Optimized energy coupling at ultrafast laser-irradiated metal surfaces by tailoring intensity envelopes: Consequences for material removal from Al samples [J].

Colombier, J. P. ;

Combis, P. ;

Rosenfeld, A. ;

Hertel, I. V. ;

Audouard, E. ;

Stoian, R. .

PHYSICAL REVIEW B, 2006, 74 (22)

[5] Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides [J].

Eaton, Shane M. ;

Zhang, Haibin ;

Ng, Mi Li ;

Li, Jianzhao ;

Chen, Wei-Jen ;

Ho, Stephen ;

Herman, Peter R. .

OPTICS EXPRESS, 2008, 16 (13) :9443-9458

[6] Plasma evolution during metal ablation with ultrashort laser pulses [J].

König, J ;

Nolte, S ;

Tünnermann, A .

OPTICS EXPRESS, 2005, 13 (26) :10597-10607

[7] Thermodynamic pathways to melting, ablation, and solidification in absorbing solids under pulsed laser irradiation [J].

Lorazo, P ;

Lewis, LJ ;

Meunier, M .

PHYSICAL REVIEW B, 2006, 73 (13)

[8] CRITICAL-ASSESSMENT OF THERMAL MODELS FOR LASER SPUTTERING AT HIGH FLUENCES [J].

MIOTELLO, A ;

KELLY, R .

APPLIED PHYSICS LETTERS, 1995, 67 (24) :3535-3537

[9] Short-pulse laser ablation of solid targets [J].

Momma, C ;

Chichkov, BN ;

Nolte, S ;

vonAlvensleben, F ;

Tunnermann, A ;

Welling, H ;

Wellegehausen, B .

OPTICS COMMUNICATIONS, 1996, 129 (1-2) :134-142

[10] Ablation of metals by ultrashort laser pulses [J].

Nolte, S ;

Momma, C ;

Jacobs, H ;

Tunnermann, A ;

Chichkov, BN ;

Wellegehausen, B ;

Welling, H .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1997, 14 (10) :2716-2722

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