Endurance Characteristics of Negative Capacitance FinFETs With Negligible Hysteresis

被引：9
|
作者：
Cai, Yuwei [1 ,2 ]
Zhang, Qinzhu [1 ,2 ]
Zhang, Zhaohao [1 ,2 ]
Xu, Gaobo [1 ,2 ]
Luo, Yanna [1 ,2 ]
Gu, Jie [1 ,2 ]
Gan, Weizhuo [1 ,2 ]
Lin, Xiang [1 ,2 ]
Xu, Renren [1 ,2 ]
Wu, Zhenhua [1 ,2 ]
Yin, Huaxiang [1 ,2 ]
Wang, Wenwu [1 ,2 ]
Xu, Qiuxia [1 ,2 ]
Ye, Tianchun [1 ,2 ]
机构：
[1] Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China
[2] Univ Chinese Acad Sci, Sch Microelect, Beijing 100049, Peoples R China
来源：
IEEE ELECTRON DEVICE LETTERS | 2021年 / 42卷 / 02期
关键词：
Negative capacitance (NC); endurance; Hf0.5Zr0.5O2; FinFET; subthreshold swing (SS); hysteresis;
D O I：
10.1109/LED.2020.3048349
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this letter, the endurance characteristics of negative capacitance (NC) FinFETs with an ultra-steep sub-threshold swing (SS) and negligible hysteresis were investigated by an examination approach to emulate long-term logic operation. Detailed variation characteristics for different electrical parameters are summarized for devices subjected to up to 1010 switching pulse cycles. The average values of the threshold voltages (V(t)s) and hysteresis of the NC-FinFETs exhibited a clear initial increase followed by a decrease as the number of switching cycles was increased; however, the variation of the SS had a different behavior. This result could be attributed to capacitance mismatching in the NC devices induced by a capacitance change of the ferroelectric film. These findings provide an effective method for confirming the capacitance matching model and also offer a guide for design of NC-FET devices and their implementation in future real circuit applications.
引用
收藏
页码：260 / 263
页数：4
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