Dielectric constant measurement of thin films by differential time-domain spectroscopy

被引:140
作者
Jiang, ZP [1 ]
Li, M [1 ]
Zhang, XC [1 ]
机构
[1] Rensselaer Polytech Inst, Dept Phys, Troy, NY 12180 USA
关键词
D O I
10.1063/1.126587
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present a theoretical model and preliminary experimental results on the dielectric constant measurement of thin films by using differential time-domain spectroscopy. This technique greatly reduces the minimum measurable thickness, and it promises the dielectric constant measurement of mu m-thick thin films with the frequency range from GHz to THz. (C) 2000 American Institute of Physics. [S0003-6951(00)03922-X].
引用
收藏
页码:3221 / 3223
页数:3
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