The influence of the temperature increase on the tribological behavior of DLC films by RF-PECVD

被引:2
作者
Cho, Yong-Kyung [1 ]
Jeon, Hong-Gyu [1 ]
Cho, Dae-Hyun [1 ]
Lee, Young-Ze [1 ]
机构
[1] Sungkyunkwan Univ, Sch Mech Engn, Suwon 440746, South Korea
来源
EXPERIMENTAL MECHANICS IN NANO AND BIOTECHNOLOGY, PTS 1 AND 2 | 2006年 / 326-328卷
关键词
plasma enhanced chemical vapor deposition; diamond-like carbon films; friction and wear; ball-on-disk; Raman spectroscopy;
D O I
10.4028/www.scientific.net/KEM.326-328.301
中图分类号
Q81 [生物工程学(生物技术)]; Q93 [微生物学];
学科分类号
071005 ; 0836 ; 090102 ; 100705 ;
摘要
DLC (Diamond Like Carbon) films show very desirable surface interactions with high hardness, low friction coefficient, and good wear-resistance properties. The friction behavior of hydrogenated DLC film is dependent on tribological environment, especially surrounding temperature. In this work, the tribological behaviors of DLC (Diamond-like carbon) films, prepared by the radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method, were studied in elevated temperatures. The ball-on-disk tests with DLC films on steel specimens were conducted at a sliding speed of 60 rpm, a load of 10 N, and Surrounding various temperatures of 25 degrees C, 40 degrees C, 55 degrees C and 75 degrees C. The results show considerable dependency of DLC tribological parameters on temperature. The friction coefficient decreased as the surrounding temperature increased. After tests the wear tracks of hydrogenated DLC film were analyzed by optical microscope, scanning electron spectroscopy (SEM) and Raman spectroscopy. The surface roughness and 3-D images of wear track were also obtained by an atomic force microscope (AFM).
引用
收藏
页码:301 / +
页数:2
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