A new method of non-contact gauge block calibration using a fringe-counting technique: I. Theoretical basis

被引:19
作者
Dobosz, M. [1 ]
Iwasinska-Kowalska, O. [1 ]
机构
[1] Warsaw Univ Technol, Mechatron Dept, Inst Metrol & Measuring Syst, PL-02525 Warsaw, Poland
关键词
Absolute length measurement; Zero interference order fringe; Gauge block; COHERENCE TANDEM INTERFEROMETER; REMOTE CALIBRATION; LENGTH; LASER;
D O I
10.1016/j.optlastec.2009.05.012
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A new non-contact interference method for gauge block or length bar calibration is presented. A central interference fringe of polychromatic light is used for the determination of the end surface position of the measured artefact. Distances referring to these positions are measured using a fringe-counting technique, with a wavelength-stabilized laser interferometer. Absolute and comparative measurement methods are proposed. A new technique for central interference fringe detection and identification is discussed. (C) 2009 Published by Elsevier Ltd.
引用
收藏
页码:141 / 148
页数:8
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