Binary pure-phase filter optimized the optical distribution of solid immersion lens

被引:0
作者
Lu, YH [1 ]
Xie, JP [1 ]
Hai, M [1 ]
机构
[1] Univ Sci & Technol China, Dept Phys, Hefei 230026, Peoples R China
关键词
phase filter; solid immersion lens; optical storage;
D O I
暂无
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A binary (pi/2 - 0) two-zone phase filter is proposed to optimize the optical distribution of solid immersion lens (SIL). The analysis using angular spectrum method shows that the phase filter can not only decrease the full-width at half maximum (FWHM) of the optical distribution but also increase the depth of focus of the SIL system. Furthermore, the lateral distribution profile is also optimized. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:251 / 255
页数:5
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