Ultra-sensitive gas pressure sensor based on vernier effect with controllable amplification factor

被引:25
|
作者
Wang, Qiao Han [1 ]
Liu, Xin [1 ]
Wang, D. N. [1 ]
机构
[1] China Jiliang Univ, Coll Opt & Elect Technol, Hangzhou 310018, Peoples R China
基金
中国国家自然科学基金;
关键词
Interferometry; Optical fiber sensors; Gas pressure;
D O I
10.1016/j.yofte.2020.102404
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present an optical fiber gas pressure sensor based on two cascaded Fabry-Perot interferometer cavities, one is a section of capillary tube spliced with single mode fiber at its two ends and the other consists of a pair of in-fiber reflection mirrors inscribed by use of femtosecond laser micromachining. The cavity length difference of the two Fabry-Perot interferometers can be precisely controlled to achieve an extremely large sensitivity when vernier effect is utilized. The pressure sensitivity obtained is similar to 303.65 pm/kPa. Moreover, the temperature cross-sensitivity of the device achieved is as low as 0.124 kPa/degrees C. The device is flexible in design, easy in fabrication, convenient in operation and has high potential in medical, environmental monitoring and other industrial applications.
引用
收藏
页数:5
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