Depth-dependent local structures in thin films unraveled by grazing-incidence X-ray absorption spectroscopy

被引：7

作者：

Souza-Neto, Narcizo M. ^{[1
,2
]}

Ramos, Aline Y. ^{[1
,3
,4
]}

Tolentino, Helio C. N. ^{[1
,3
,4
]}

Martins, Alessandro ^{[5
]}

Santos, Antonio D. ^{[2
]}

机构：

[1] LNLS, BR-13084971 Campinas, SP, Brazil

[2] Univ Sao Paulo, Inst Fis, Dept Fis Mat & Mecan, BR-05508 Sao Paulo, Brazil

[3] CNRS, Inst Neel, F-38042 Grenoble 9, France

[4] Univ Grenoble 1, F-38042 Grenoble 9, France

[5] Univ Fed Goias, Goiania, Go, Brazil

来源：

JOURNAL OF APPLIED CRYSTALLOGRAPHY | 2009年 / 42卷

关键词：

FINE-STRUCTURE; REFLECTION; SCATTERING; SURFACE; FLUORESCENCE; DIFFRACTION; FEPT;

D O I：

10.1107/S0021889809042678

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A method of using X-ray absorption spectroscopy together with resolved grazing-incidence geometry for depth profiling of atomic, electronic or chemical local structures in thin films is presented. The quantitative deconvolution of thickness-dependent spectral features is performed by fully considering both scattering and absorption formalisms. Surface oxidation and local structural depth profiles in nanometric FePt films are determined, exemplifying the application of the method.

引用

页码：1158 / 1164

页数：7

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