Electron-electron interactions in cathode objective lenses

The impact of electron-electron interactions on the electron-optical performance of imaging cathode objective lenses is evaluated. Three types of cathode objectives are considered: decelerating and accelerating electrostatic, and combined magnetic lenses. The beam blur is calculated for field sizes ranging from 50 mum x 50 mum to 500 mum x 500 mum and total beam currents ranging from 200 nA to 20 muA. The functional dependence of the beam blur upon electron beam current and current density is elucidated in detail. (C) 2002 Elsevier Science B.V. All rights reserved.