A CMOS-compatible fluid density sensor

被引：10

作者：

Westberg, D ^{[1
]}

Paul, O ^{[1
]}

Andersson, G ^{[1
]}

Baltes, H ^{[1
]}

机构：

[1] ETH ZURICH, PHYS ELECT LAB, HPT H6, CH-8093 ZURICH, SWITZERLAND

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1997年 / 7卷 / 03期

关键词：

D O I：

10.1088/0960-1317/7/3/047

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report a CMOS-compatible resonant sensor to measure the density of fluids. The device is fabricated using a standard CMOS process followed by simple post-processing consisting of sacrificial aluminium etching and silicon bulk micromachining. The sample volume of liquid probed by the resonating structure is only 11 pl.

引用

页码：253 / 255

页数：3

共 7 条

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Westberg, D ;

Paul, O ;

Andersson, GI ;

Baltes, H .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1996, 6 (04) :376-384

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