High-precision displacement measurement method for three degrees of freedom-compliant mechanisms based on computer micro-vision

被引：19

作者：

Wu, Heng ^{[1
]}

Zhang, Xianmin ^{[1
]}

Gan, Jinqiang ^{[1
]}

Li, Hai ^{[1
]}

He, Zhenya ^{[1
]}

机构：

[1] S China Univ Technol, Sch Mech & Automot Engn, Guangdong Prov Key Lab Precis Equipment & Mfg Tec, Guangzhou 510640, Guangdong, Peoples R China

来源：

APPLIED OPTICS | 2016年 / 55卷 / 10期

基金：

中国国家自然科学基金;

关键词：

DIGITAL IMAGE CORRELATION; CLASSIFICATION; ALGORITHM;

D O I：

10.1364/AO.55.002594

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A practical method for the high-precision displacement measurements of the three degrees of freedom-compliant mechanisms based on computer micro-vision is proposed. The method consists of two steps. In the first step, the candidate pixels are selected using a ring projection transform matching approach. In the second step, the exact location is determined by an improved pseudo-Zernike moment method. The setup of the micro-vision system is also introduced. A series of simulations is carried out and the results show that the proposed algorithm enjoys extremely high precision and robustness in the presence of image translations and rotations. Finally, a microvision system and a laser interferometer measurement (LIM) system are built up to validate and compare the actual performances of the proposed method. The experimental results demonstrate that the proposed approach can obtain a high accuracy and shows higher operability and stability than the LIM system. Moreover, the measuring accuracy can reach a pixel. (C) 2016 Optical Society of America

引用

页码：2594 / 2600

页数：7

共 32 条

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