Scaling of nano-Schottky-diodes

被引:235
作者
Smit, GDJ
Rogge, S
Klapwijk, TM
机构
[1] Delft Univ Technol, Dept Appl Phys, NL-2628 CJ Delft, Netherlands
[2] Delft Univ Technol, DIMES, NL-2628 CJ Delft, Netherlands
关键词
D O I
10.1063/1.1521251
中图分类号
O59 [应用物理学];
学科分类号
摘要
A generally applicable model is presented to describe the potential barrier shape in ultrasmall Schottky diodes. It is shown that for diodes smaller than a characteristic length l(c) (associated with the semiconductor doping level) the conventional description no longer holds. For such small diodes the Schottky barrier thickness decreases with decreasing diode size. As a consequence, the resistance of the diode is strongly reduced, due to enhanced tunneling. Without the necessity of assuming a reduced (non-bulk) Schottky barrier height, this effect provides an explanation for several experimental observations of enhanced conduction in small Schottky diodes. (C) 2002 American Institute of Physics.
引用
收藏
页码:3852 / 3854
页数:3
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