Near common-path optical fiber interferometer for potentially fast on-line microscale-nanoscale surface measurement

被引：19

作者：

Jiang, Xiangqian ^{[1
]}

Wang, Kaiwei ^{[1
]}

Martin, Haydn ^{[1
]}

机构：

[1] Univ Huddersfield, Ctr Precis Technol, Huddersfield HD1 3DH, W Yorkshire, England

来源：

OPTICS LETTERS | 2006年 / 31卷 / 24期

关键词：

D O I：

10.1364/OL.31.003603

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface. (c) 2006 Optical Society of America.

引用

页码：3603 / 3605

页数：3

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