A Hybrid Microfluidic/CMOS Capacitive Sensor Dedicated to Lab-on-Chip Applications

被引：53

作者：

Ghafar-Zadeh, Ebrahim ^{[1
]}

Sawan, Mohamad ^{[1
]}

机构：

[1] Polytech Montreal, Dept Elect Engn, Polystim Neurotechnol Lab, Montreal, PQ H3C 3A7, Canada

来源：

IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS | 2007年 / 1卷 / 04期

基金：

加拿大自然科学与工程研究理事会;

关键词：

Capacitive sensor; CMOS technology; lab-on-chip (LoC); microfluidic packaging;

D O I：

10.1109/TBCAS.2008.915641

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

A hybrid microfluidic/IC capacitive sensor is presented in this paper for highly integrated lab-on-chips (LoCs). We put forward the design and implementation of a charge based capacitive sensor array in 0.18-mu m CMOS process. This sensor chip is incorporated with a microfluidic channel using direct-write microfluidic fabrication process (DWFP). The design, construction and experimental results as well are demonstrated using four different chemical solutions with known dielectric constants. The proposed highly sensitive CMOS capacitive sensor (approximate to 530 mV/fF) along with low complexity DWFP emerges as clear favorite for LoC applications.

引用

页码：270 / 277

页数：8

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