Stability of double gate amorphous In-Ga-Zn-O thin-film transistors with various top gate designs

被引:2
作者
Chen, Te-Chih [1 ]
Kuo, Yue [1 ]
Chang, Ting-Chang [2 ]
Chen, Min-Chen [2 ]
Chen, Hua-Mao [3 ]
机构
[1] Texas A&M Univ, Film Nano & Microelect Res Lab, College Stn, TX 77845 USA
[2] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 80424, Taiwan
[3] Natl Chiao Tung Univ, Dept Photon & Inst Electroopt Engn, Hsinchu 300, Taiwan
关键词
A-IGZO TFT; BULK-ACCUMULATION; CIRCUITS; DISPLAY; SPEED; DRIVE; PANEL;
D O I
10.7567/JJAP.56.120303
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electrical characteristics of the dual-gate amorphous indium gallium zinc oxide thin-film transistors have been studied. Compared with the traditional bottom gate thin film transistor, the dual-gate structure has a larger on-current and a smaller threshold voltage shift because of the formation of an additional carrier channel and the depletion of the semiconductor layer. The top gate-to-channel barrier height is critical to threshold voltage and the stability of the thin film transistor. The complete overlap between the top gate and the channel region is important for the top channel function, which warrants the large on-current and low threshold slope shift. Therefore, the top gate design is critical to the performance and stability of the dual-gate thin film transistor. (C) 2017 The Japan Society of Applied Physics
引用
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页数:3
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